Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100)
Bibliographic Information
- Title
- Position-controlled formation of Si nanopores by chemical vapor deposition of SiC/SOI(100)
- Author
- Yoshifumi Ikoma, Hafizal Yahaya, Hirofumi Sakita, Yuta Nishino, Teruaki Motooka
Journal
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- Proc.SPIE 7995 79951Y
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Proc.SPIE 7995 79951Y 2010
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Details 詳細情報について
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- CRID
- 1010282257034325504
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- Article Type
- journal article
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- Data Source
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- KAKEN