Enhancement of memory retention time of metal/ferroelectric/insulator/semiconductor structure by using fast annealing and nitrogen radicalirradiation

Bibliographic Information

Title
Enhancement of memory retention time of metal/ferroelectric/insulator/semiconductor structure by using fast annealing and nitrogen radicalirradiation
Author
Van Hai, S.Nakashima, M.OkuyamaLe

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Details 詳細情報について

  • CRID
    1010282257047745819
  • Article Type
    journal article
  • Data Source
    • KAKEN

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