Variations in contrast of scanning electron microscope images for microstructure analysis of Si-based semiconductor materials, Masaru Itakura
書誌事項
- タイトル
- Variations in contrast of scanning electron microscope images for microstructure analysis of Si-based semiconductor materials, Masaru Itakura
- 著者
- Noriyuki Kuwano
収録刊行物
-
- Kaoru Sato and Shigeaki Tachibana, J. Electron Microscopy
-
Kaoru Sato and Shigeaki Tachibana, J. Electron Microscopy 59 165-173, 2010