[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy

Bibliographic Information

Title
Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy
Author
S.Inamoto, J.Yamasaki, E.Okunishi, K.Kakushima, H.Iwai, N.Tanaka

Journal

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Details

  • CRID
    1010282257077622029
  • Article Type
    journal article
  • Data Source
    • KAKEN

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