Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy

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タイトル
Annealing effects on a high-k lanthanum oxide film on Si (001) analyzed by aberration-corrected transmission electron microscopy/scanning transmission electron microscopy and electron energy loss spectroscopy
著者
S.Inamoto, J.Yamasaki, E.Okunishi, K.Kakushima, H.Iwai, N.Tanaka

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詳細情報

  • CRID
    1010282257077622029
  • 資料種別
    journal article
  • データソース種別
    • KAKEN

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