Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics
Bibliographic Information
- Title
- Magnetic Field-Assisted Finishing of Silicon Microelectromechanical Systems Micropore X-ray Optics
- Author
- R.E. Riveros、I. Mitsuishi、U. Takagi、Y. Ezoe、K. Mitsuda、H. Yamaguchi、T. Boggs、K. Ishizu、T. Moriyama
Journal
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- J. Manufacturing Science and Engineering
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J. Manufacturing Science and Engineering 134 51001-, 2012
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Details 詳細情報について
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- CRID
- 1010282257154961282
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- Article Type
- journal article
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- Data Source
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- KAKEN