Simulation of secondary electron emission from a stepped surface in scanning ion microscopes
Bibliographic Information
- Title
- Simulation of secondary electron emission from a stepped surface in scanning ion microscopes
- Author
- Ohya K
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 53 2014
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Details 詳細情報について
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- CRID
- 1010282257185630346
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- Article Type
- journal article
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- Data Source
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- KAKEN