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Simulation of secondary electron emission from a stepped surface in scanning ion microscopes
Bibliographic Information
- Title
- Simulation of secondary electron emission from a stepped surface in scanning ion microscopes
- Author
- Ohya K
Journal
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 53 2014
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Details 詳細情報について
-
- CRID
- 1010282257185630346
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
