[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering

Bibliographic Information

Title
Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering
Author
Tetsuya Yamamoto, Akira Tamura, Shigeyoshi Usami, Tadashi Mitsunari, Kentaro Nagamatsu, Shugo Nitta, Yoshio Honda, and Hiroshi Amano

Journal

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Details

  • CRID
    1010282257210267524
  • Article Type
    journal article
  • Data Source
    • KAKEN

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