Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering
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- 本田 善央
- 名古屋大学
書誌事項
- タイトル
- Evaluation of excess In during metal organic vapor-phase epitaxy growth of InGaN by monitoring via in situ laser scattering
- 著者
- Tetsuya Yamamoto, Akira Tamura, Shigeyoshi Usami, Tadashi Mitsunari, Kentaro Nagamatsu, Shugo Nitta, Yoshio Honda, and Hiroshi Amano
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 55 2016
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詳細情報
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- CRID
- 1010282257210267524
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- 資料種別
- journal article
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- データソース種別
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- KAKEN