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Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems
Bibliographic Information
- Title
- Technique for preparing defect-free spray coated resist-film on three-dimensional micro-electromecanical systems
- Author
- V.K.Singh, M.Sasaki, J.-H.Song, K.Hane
Journal
-
- Jpn. J. Appl. Phys vol. 44
-
Jpn. J. Appl. Phys vol. 44 2016-2020, 2005
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Details 詳細情報について
-
- CRID
- 1010282257407551242
-
- Article Type
- journal article
-
- Data Source
-
- KAKEN
