Deposition of Thin Film Using a Surface Acoustic Wave Device
Bibliographic Information
- Title
- Deposition of Thin Film Using a Surface Acoustic Wave Device
- Author
- N.Murochi, et. al.
Journal
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- Jpn.J.Appl.Phys. 46
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Jpn.J.Appl.Phys. 46 4754-4759, 2007
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Details 詳細情報について
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- CRID
- 1010282257411609864
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- Article Type
- journal article
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- Data Source
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- KAKEN