Finishing of EUV photomask substrates by CNC precessed bonnet polisher

Bibliographic Information

Title
Finishing of EUV photomask substrates by CNC precessed bonnet polisher
Author
A. Beaucamp

Journal

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Details 詳細情報について

  • CRID
    1010282257412534805
  • Article Type
    journal article
  • Data Source
    • KAKEN

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