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Finishing of EUV photomask substrates by CNC precessed bonnet polisher

Bibliographic Information

Title: Finishing of EUV photomask substrates by CNC precessed bonnet polisher

Author: A. Beaucamp

Journal

Proc. SPIE

Proc. SPIE 8880 2013

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Details 詳細情報について

CRID

1010282257412534805
Article Type

journal article
Data Source
- KAKEN

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