Ge/GeO2 Interface Control with High Pressure Oxidation for Improving Electrical Characteristics
Bibliographic Information
- Title
- Ge/GeO2 Interface Control with High Pressure Oxidation for Improving Electrical Characteristics
- Author
- C.H. Lee, T. Tabata, T. Nishimura, K. Nagashio, K. Kita, A. Toriumi
Journal
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- ECS Trans. 19(1)
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ECS Trans. 19(1) 165-173, 2009
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Details 詳細情報について
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- CRID
- 1010282257416065797
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- Article Type
- journal article
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- Data Source
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- KAKEN