[Updated on Apr. 18] Integration of CiNii Articles into CiNii Research

Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma

Bibliographic Information

Title
Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma
Author
Hideki Ono

Journal

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Details

  • CRID
    1010282257423310621
  • Article Type
    journal article
  • Data Source
    • KAKEN

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