Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma
書誌事項
- タイトル
- Deposition of ZnO in energy-controlled O_2/Ar hollow-type magnetron RF discharge plasma
- 著者
- Hideki Ono
収録刊行物
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- 18th International Symposium on Plasma Chemistry
-
18th International Symposium on Plasma Chemistry 2007