Application of SPELEEM to high-k gate dielectrics:relationshipbetween surface morphology and photoelectron spectra duringHf-silicide formation
Bibliographic Information
- Title
- Application of SPELEEM to high-k gate dielectrics:relationshipbetween surface morphology and photoelectron spectra duringHf-silicide formation
- Author
- R.Yasuhara
Journal
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- Appl.Surf.Sci (In press)
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Appl.Surf.Sci (In press) 2007
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Details 詳細情報について
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- CRID
- 1010282257437865732
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- Article Type
- journal article
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- Data Source
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- KAKEN