A micro thermal switch with a stiffness-enhanced thermal isolation structure
Bibliographic Information
- Title
- A micro thermal switch with a stiffness-enhanced thermal isolation structure
- Author
- T.Tsukamoto, M.Esashi, S.Tanaka
Journal
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- J.Micromech.Microeng.
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J.Micromech.Microeng. 21 104008-, 2011
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Details 詳細情報について
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- CRID
- 1010282257459219072
-
- Article Type
- journal article
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- Data Source
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- KAKEN