Flexible Electro-Rheological (ER) Microvalve Based on Flexible SU-8 Cantilever structures
Bibliographic Information
- Title
- Flexible Electro-Rheological (ER) Microvalve Based on Flexible SU-8 Cantilever structures
- Author
- J.W.Kim, K.Yosida, K.Kohda, S.Yokota
Journal
-
- Proc. 10th Int. Conf. in Mechatronics Technology (ICMT2006)
-
Proc. 10th Int. Conf. in Mechatronics Technology (ICMT2006) 2006
