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Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination
Open Access
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- Horiuchi Toshiyuki
- 東京電機大学
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- 小林 宏史
- 東京電機大学
Bibliographic Information
- Title
- Patterning-Area Expansion of Parabolic-Mirror Projection Optics for Lithography Using One-Sided and Collimated Illumination
- Author
- Toshiyuki Horiuchi、Jun-ya Iwasaki、Hiroshi Kobayashi
Journal
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- IOSR Journal of Applied PHysics
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IOSR Journal of Applied PHysics 14(5)Series-2 12-20, 2022
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Details 詳細情報について
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- CRID
- 1010298668284171266
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- Article Type
- journal article
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- Data Source
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- KAKEN