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Adsorption and desorption of deuterium are studied on the partially oxidized Si(100) surfaces. The partial oxygen coverage causes a decrease in the initial adsorption probability of D atoms. The observed D2 temperature-programmed-desorption (TPD) spectra comprise of multiple components depending on the oxygen coverage (θO). For θO=0.1ML the D2 TPD spectrum is deconvoluted into four components, each of which has a peak in the temperature region higher than the D2 TPD peaking at 780 K on the oxygen free surface. The highest TPD component with a peak around 1040 K is attributed to D adatoms on Si dimers backbonded by an oxygen atom. The other components are attributed to D adatoms on the nearest or second nearest sites of the O-backbonded Si dimers. D adatoms on the partially oxidized Si surfaces are abstracted by gaseous H atoms along two different abstraction pathways: one is the pathway along direct abstraction (ABS) to form HD molecules and the other is the pathway along indirect abstraction via collision-induced-desorption (CID) of D adatoms to form D2 molecules. The ABS pathway is less seriously affected by oxygen adatoms. On the other hand, the CID pathway receives a strong influence of oxygen adatoms since the range of surface temperature effective for CID is found to considerably shift to higher surface temperatures with increasing θO. Gradual substitution of D adatoms with H atoms during H exposure results in HD desorption along the CID pathway in addition to the ABS one. By employing a modulated beam technique the CID-related HD desorption is directly distinguished from the ABS-related one.
収録刊行物
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- Physical review. Third series. B, Condensed matter and materials physics
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Physical review. Third series. B, Condensed matter and materials physics 67 (15), 155316-1-155316-8, 2003-04-25
Published by the American Physical Society through the American Institute of Physics
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詳細情報 詳細情報について
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- CRID
- 1050001338909629184
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- NII論文ID
- 120002440521
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- NII書誌ID
- AA11187113
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- ISSN
- 24699969
- 10980121
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- HANDLE
- 10228/296
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- 本文言語コード
- en
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- 資料種別
- journal article
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- データソース種別
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- IRDB
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