Development of ID-blade slicer monitoring system for cutting 12-inch silicon ingot
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説明
This work is concerned with an experimental study on online measurement of the states of ID saw blade cutting a 12-inch crystal ingot. An online monitoring system consisting of a 3-axis piezoelectric sensor, a three-band digital filter, a digital oscilloscope and computer was developed. Since the acoustical and chatter vibration signals during cutting ingot were complex, they are decomposed in three frequency regions to evaluate the blade extension circumstance, the sharpness of blade edge and the interference between blade and ingot. The proposed ID-Blade slicer monitoring system is validated for evaluation of the blade slicing 12-inch silicon ingots.
収録刊行物
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- Applied electromagnetism and mechanics
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Applied electromagnetism and mechanics 9 539-540, 2001
Japan Society of Applied Electromagnetics
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詳細情報 詳細情報について
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- CRID
- 1050011097150640640
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- NII論文ID
- 120006665696
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- ISSN
- 18758800
- 13835416
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- 本文言語コード
- en
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- 資料種別
- conference paper
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- データソース種別
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- IRDB
- CiNii Articles
- OpenAIRE
