Abstract
application/pdf
学術論文 (Article)
科研費報告書収録論文(課題番号:13305010・基盤研究(A)(2) ・H13~H15/研究代表者:江刺, 正喜/ナノメートルの精度で動く分布型マイクロ・ナノマシン)
330944 bytes
Journal
-
- TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems
-
TRANSDUCERS 2003 : the 12th International Conference on Solid-State Sensors, Actuators and Microsystems 2 1295-1298, 2003
Institute of Electrical and Electronics Engineers
- Tweet
Details 詳細情報について
-
- CRID
- 1050282677720496896
-
- HANDLE
- 10097/48055
-
- Text Lang
- en
-
- Article Type
- journal article
-
- Data Source
-
- IRDB