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Determination of the point resolution of high-resolution transmission electron microscope using the through-focus technique
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- Fukushima, Kurio
- STEM Corporation
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- Taniguchi, Yoshifumi
- Core Technology & Solutions Business Group, Hitachi High-Tech Corporation
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- Matsushita, Mitsuhide
- EP Business Unit, JEOL Ltd.
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- Sugiyama, Masaaki
- Research Center for Ultra-High Voltage Electron Microscopy, Osaka Univ.
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- Kaneko, Kenji
- Department of Materials, Graduate School of Engineering, Kyushu Univ.
Bibliographic Information
- Other Title
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- Point resolution of high resolution transmission electron microscope (HREM) and its measurement methods.
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Description
From the viewpoint of evaluating the instrumental performance of high-resolution electron microscopy (HREM), the Scherzer condition was investigated using information theory. As a result, the optimum defocus amount Δf can be expressed based on (C_sλ)^<1/2>, and the formula Δf = 1.12(C_sλ)^<1/2> is obtained. Furthermore, a procedure for measuring point resolution using the through-focus technique is developed, and a new method for determining the spherical aberration coefficient using the variance of Δf is introduced in the procedure.
Journal
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- Micron
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Micron 182 103639-, 2024-07
Elsevier
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Keywords
Details 詳細情報について
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- CRID
- 1050303932808675072
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- NII Book ID
- AA10892936
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- ISSN
- 18784291
- 09684328
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- HANDLE
- 2324/7238745
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- Text Lang
- en
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- Article Type
- journal article
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- Data Source
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- IRDB