The layer thickness dependence of InAs/GaSb superlattices grown by metalorganic chemical vapor deposition evaluated by Raman scattering method
Bibliographic Information
- Other Title
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- ラマン散乱法を用いた有機金属気相成長法で作製したInAs/GaSb超格子の層厚依存性の評価
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Abstract
InAs/GaSb superlattices(SL) with systematic change of layer thickness grown by metalorganic chemical vapor deposition analyzed by Raman scattering method. As a result, a change in the peak shape of the Raman spectrum was observed in the superlattices having different film thicknesses. In the InAs/GaSb superlattices, a peak due to Ga-As atomic bonds that does not exist as a composition of SL was confirmed. When the layer thickness was smaller, the degree of mixing of As into the GaSb layer increased due to the influence of the residual gas.
Journal
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- Memoirs of Faculty of Engineering, University of Miyazaki
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Memoirs of Faculty of Engineering, University of Miyazaki 49 69-72, 2020-09
宮崎大学工学部
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Keywords
Details 詳細情報について
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- CRID
- 1050570264722343808
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- NII Article ID
- 120007120323
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- NII Book ID
- AA00732558
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- ISSN
- 05404924
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- HANDLE
- 10458/00010075
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- Text Lang
- ja
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- Article Type
- departmental bulletin paper
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- Data Source
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- IRDB
- CiNii Articles