Rapid isothermal processing : 12-13 October 1989, Santa Clara, California

Name: Rapid isothermal processing : 12-13 October 1989, Santa Clara, California
Author: Singh, Rajendra, Society of Photo-optical Instrumentation Engineers, North Carolina State University. Center for Advanced Electronic Materials Processing, University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing, SEMATECH (Organization)

Singh, Rajendra, Society of Photo-optical Instrumentation Engineers, North Carolina State University. Center for Advanced Electronic Materials Processing, University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing, SEMATECH (Organization)

Rapid isothermal processing : 12-13 October 1989, Santa Clara, California

Web Site CiNii 所蔵館 4館

書誌事項

タイトル: "Rapid isothermal processing : 12-13 October 1989, Santa Clara, California"

責任表示: Rajendra Singh, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH

出版者

SPIE

出版年月

c1990

書籍サイズ: 28 cm

この図書・雑誌をさがす

注記

Includes bibliographical references and index

Rapid isothermal processing : 12-13 October 1989, Santa Clara, California

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報詳細情報について

書き出し

Rapid isothermal processing : 12-13 October 1989, Santa Clara, California

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

詳細情報詳細情報について