Bibliographic Information
- Title
- "VLSI metallization : physics and technologies"
- Statement of Responsibility
- Krishna Shenai, editor
- Publisher
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- Artech House
- Publication Year
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- c1991
- Book size
- 28 cm
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
-
- CRID
- 1130000793755439744
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- NII Book ID
- BA12616053
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- ISBN
- 0890065012
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- LCCN
- 90049544
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- Web Site
- https://lccn.loc.gov/90049544
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Boston
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- Classification
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- LCC: TK7872.C68
- DC20: 621.381/52
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- Subject
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- LCSH: Electric contacts
- LCSH: Semiconductor-metal boundaries
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- Data Source
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- CiNii Books