Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California
CiNii
Available at 2 libraries
Bibliographic Information
- Title
- "Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California"
- Statement of Responsibility
- Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] SEMATECH
- Publisher
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- SPIE
- Publication Year
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- c1998
- Book size
- 28 cm
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Notes
Includes bibliographical references and index
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Details 詳細情報について
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- CRID
- 1130000793774562816
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- NII Book ID
- BA37525253
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- ISBN
- 0819427764
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
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- LCC: TK7874
- DC21: 621.3815/31
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- Data Source
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- CiNii Books