Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida

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Bibliographic Information

Title
"Modern optical characterization techniques for semiconductors and semiconductor devices : 26-27 March, 1987, Bay Point, Florida"
Statement of Responsibility
O.J. Glembocki, Fred H. Pollak, J.J. Song,chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating sponsor, the Metallurgical Society
Publisher
  • SPIE
Publication Year
  • 1987
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographies and index

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