Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA

CiNii Available at 4 libraries

Bibliographic Information

Title
"Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA"
Statement of Responsibility
Christopher J. Progler chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; Cooperating organizations SEMI-Semiconductor Equipment and Materials International SEMATECH
Publisher
  • SPIE
Publication Year
  • c2000
Book size
28 cm
Series Name / No
  • pt. 1
  • pt. 2

Search this Book/Journal

Notes

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

  • CRID
    1130000793846320512
  • NII Book ID
    BA48017673
  • ISBN
    0819436186
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
Back to top