LPCVD silicon nitride and oxynitride films : material and applications in integrated circuit technology

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Bibliographic Information

Title
"LPCVD silicon nitride and oxynitride films : material and applications in integrated circuit technology"
Statement of Responsibility
F.H.P.M. Habraken (ed.)
Publisher
  • Springer-Verlag
Publication Year
  • 1991
Book size
25 cm
Series Name / No
  • : N.Y.
  • : Berlin

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Notes

Includes bibliographical references

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