Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
CiNii
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Bibliographic Information
- Title
- "Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China"
- Statement of Responsibility
- edited by Changhui Liu
- Publisher
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- Trans Tech Publications
- Publication Year
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- c2014
- Book size
- 24 cm
- Series Name / No
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- : pbk
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Notes
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000793922097664
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- NII Book ID
- BB16368212
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- ISBN
- 9783038350477
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- Text Lang
- en
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- Country Code
- sz
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- Title Language Code
- en
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- Place of Publication
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- Durnten-Zurich
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- Data Source
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- CiNii Books