Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China

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Bibliographic Information

Title
"Material science and MEMS production : selected, peer reviewed papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China"
Statement of Responsibility
edited by Changhui Liu
Publisher
  • Trans Tech Publications
Publication Year
  • c2014
Book size
24 cm
Series Name / No
  • : pbk

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Notes

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000793922097664
  • NII Book ID
    BB16368212
  • ISBN
    9783038350477
  • Text Lang
    en
  • Country Code
    sz
  • Title Language Code
    en
  • Place of Publication
    • Durnten-Zurich
  • Data Source
    • CiNii Books
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