Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas

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Bibliographic Information

Title
"Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas"
Statement of Responsibility
Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographical references and author index

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Details 詳細情報について

  • CRID
    1130000794121053440
  • NII Book ID
    BA29176512
  • ISBN
    0819416681
  • LCCN
    94067261
  • Web Site
    https://lccn.loc.gov/94067261
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Classification
  • Data Source
    • CiNii Books
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