Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas

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Bibliographic Information

Title
"Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas"
Statement of Responsibility
Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm
Series Name / No
  • pbk.

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Notes

Includes bibliographical references and author index

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