Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas
Bibliographic Information
- Title
- "Microelectronics technology and process integration : 20-21 October 1994, Austin, Texas"
- Statement of Responsibility
- Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
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- SPIE
- Publication Year
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- c1994
- Book size
- 28 cm
- Series Name / No
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- pbk.
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Notes
Includes bibliographical references and author index
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Details 詳細情報について
-
- CRID
- 1130000794121053440
-
- NII Book ID
- BA29176512
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- ISBN
- 0819416681
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- LCCN
- 94067261
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- Web Site
- https://lccn.loc.gov/94067261
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Bellingham, Wash., USA
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- Classification
-
- LCC: TK7874
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- Data Source
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- CiNii Books