Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG

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Bibliographic Information

Title
"Nanofabrication technologies and device integration : 13-14 April 1994, Lindau, FRG"
Statement of Responsibility
Wolfgang Karthe, chair/editor ; sponsored by the Commission of European Communities, Directorate General for Science, Research, and Development, the European Optical Society (EOS), SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1994
Book size
28 cm
Series Name / No
  • :pbk.

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Notes

Includes bibliographical references and author index

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