Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

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Bibliographic Information

Title
"Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
Statement of Responsibility
editors, Richard E. Novak, Jerzy Ruzyllo ; [sponsored by the Electrochemical Society] Electronics Divisions
Publisher
  • The Electrochemical Society
Publication Year
  • c1996
Book size
23 cm

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Notes

Includes bibliographies and index

"held during the Fall Electrochemical Society meeting in Chicago, Illinois, October 1995"

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Details 詳細情報について

  • CRID
    1130000794461262336
  • NII Book ID
    BA28544359
  • ISBN
    1566771153
  • LCCN
    95061593
  • Web Site
    https://lccn.loc.gov/95061593
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
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