Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
Bibliographic Information
- Title
- "Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing"
- Statement of Responsibility
- editors, Richard E. Novak, Jerzy Ruzyllo ; [sponsored by the Electrochemical Society] Electronics Divisions
- Publisher
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- The Electrochemical Society
- Publication Year
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- c1996
- Book size
- 23 cm
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Notes
Includes bibliographies and index
"held during the Fall Electrochemical Society meeting in Chicago, Illinois, October 1995"
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Details 詳細情報について
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- CRID
- 1130000794461262336
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- NII Book ID
- BA28544359
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- ISBN
- 1566771153
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- LCCN
- 95061593
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- Web Site
- https://lccn.loc.gov/95061593
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books