Bibliographic Information
- Title
- "Semiconductor microlithography V"
- Statement of Responsibility
- Jim Dey, editor ; presented by the Society of Photo-optical Instrumentation Engineers in cooperation with the Northern California Microphotomask/Masking Working Group and the International Society for Hybrid Microelectronics
- Publisher
-
- S.P.I.E.-- Society of Photo-optical Instrumentation Engineers
- Publication Year
-
- c1980
- Book size
- 28 cm
- Series Name / No
-
- pbk.
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Notes
March 17-18, 1980, San Jose, California
Includes bibliographical references and indexes
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Details 詳細情報について
-
- CRID
- 1130000794473203328
-
- NII Book ID
- BA23910959
-
- ISBN
- 089252250X
-
- LCCN
- 80050727
-
- Web Site
- https://lccn.loc.gov/80050727
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Bellingham, Wash.
-
- Classification
-
- LCC: TK7871.85
- DC19: 621.381/71
-
- Subject
-
- Data Source
-
- CiNii Books
