Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California

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Bibliographic Information

Title
"Handbook of critical dimension metrology and process control : proceedings of a conference held 28-29 September 1993, Monterey, California"
Statement of Responsibility
Kevin M. Monahan, editor
Publisher
  • SPIE Optical Engineering Press
Publication Year
  • c1994
Book size
27 cm

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Notes

Includes bibliographical references

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