Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA

Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA"
Statement of Responsibility
Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Publisher
  • SPIE
Publication Year
  • c2004
Book size
28 cm
Other Title
  • Design and process integration for microelectronic manufacturing III

Search this Book/Journal

Notes

2004 conference is the third conference in the series

Includes bibliographical references and index

Related Books

See more

Details 詳細情報について

Back to top