Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA

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Bibliographic Information

Title
"Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA"
Other Title
  • Design and process integration for microelectronic manufacturing III
Statement of Responsibility
Lars W. Liebmann, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International [and] International SEMATECH
Publisher
  • SPIE
Publication Year
  • c2004
Book size
28 cm

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Notes

2004 conference is the third conference in the series

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000794661061760
  • NII Book ID
    BA86008098
  • ISBN
    0819452920
  • LCCN
    2004303081
  • Web Site
    https://lccn.loc.gov/2004303081
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Classification
  • Data Source
    • CiNii Books
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