Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey
Bibliographic Information
- Title
- "Spectroscopic characterization techniques for semiconductor technology IV : 25-26 March 1992, Somerset, New Jersey"
- Statement of Responsibility
- Orest J. Glembocki, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
- Publisher
-
- SPIE
- Publication Year
-
- c1992
- Book size
- 28 cm
Search this Book/Journal
Notes
Includes bibliographical references and index
- Tweet
Details 詳細情報について
-
- CRID
- 1130000794742664704
-
- NII Book ID
- BA2262849X
-
- ISBN
- 0819408395
-
- LCCN
- 92081135
-
- Web Site
- https://lccn.loc.gov/92081135
-
- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
-
- Bellingham, Wash.
-
- Classification
-
- LCC: TK7871.85
- DC20: 621.381/52
-
- Subject
-
- Data Source
-
- CiNii Books