Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA

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Bibliographic Information

Title
"Optical metrology roadmap for the semiconductor, optical, and data storage industries , 30-31 July 2000, San Diego, USA"
Statement of Responsibility
Ghanim A. Al-Jumaily, ... [et al.] chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE--the International Society for Optical Engineering
Publication Year
  • c2000
Book size
28 cm

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Notes

Includes bibliographical references and index

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Details 詳細情報について

  • CRID
    1130000794828218496
  • NII Book ID
    BA49673994
  • ISBN
    0819437441
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Bellingham, Wash., USA
  • Data Source
    • CiNii Books
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