A wafer chuck for use between -196 and 350[0]C

HathiTrust 1979 Web Site CiNii Available at 1 libraries

Bibliographic Information

Title
"A wafer chuck for use between -196 and 350[0]C"
Statement of Responsibility
R.Y. Koyama and M.G. Buehler
Publisher
  • U.S. G.P.O.
Publication Year
  • 1979
Book size
26 cm
Volume(Year)
  • no.400:55

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Notes

Bibliography: p. 13

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