Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A.

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書誌事項

タイトル: "Advanced Metallization Conference 2002 (AMC 2002) : proceedings of the conference held October 1-3, 2002, in San Diego, California, U.S.A., and October 29-30, 2002, University of Tokyo, Tokyo, Japan. This Conference is MRS affiliated and sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A."

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Includes bibliographical references and indexes

Other editors: Timothy S. Cale, Shigeaki Zaima, Tomohiro Ohta