Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology
Bibliographic Information
- Title
- "Proceedings of the second Symposium on Process Physics and Modeling in Semiconductor Technology"
- Statement of Responsibility
- edited by G.R. Srinivasan, J. Plummer, S. T. Pantelides
- Publisher
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- Electrochemical Society
- Publication Year
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- c1990
- Book size
- 23 cm
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Notes
Spine title: Process physics and modeling in semiconductor technology
Includes bibliographical references
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Details 詳細情報について
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- CRID
- 1130000794853858304
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- NII Book ID
- BA11822173
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- LCCN
- 90085817
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- Web Site
- https://lccn.loc.gov/90085817
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ (10 S. Main St., Pennington 08534-2896)
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- Classification
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- LCC: TK7871.85
- DC20: 621.381/52/011
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- Subject
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- Data Source
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- CiNii Books