Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas
書誌事項
- タイトル
- "Optical characterization techniques for high-performance microelectronic device manufacturing : 20 October 1994, Austin, Texas"
- 責任表示
- Jagdish P. Mathur, John Lowell, Ray T. Chen, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- 出版者
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- SPIE
- 出版年月
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- c1994
- 書籍サイズ
- 28 cm
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注記
Includes bibliographical references and author index
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詳細情報 詳細情報について
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- CRID
- 1130000794921008640
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- NII書誌ID
- BA28173417
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- ISBN
- 0819416703
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- LCCN
- 94067263
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- Web Site
- https://lccn.loc.gov/94067263
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- 本文言語コード
- en
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- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Bellingham, Wash., USA
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- 分類
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- LCC: TK7871.85
- DC20: 621.3815/2/0287
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- 件名
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- LCSH: Semiconductors -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Design and construction -- Congresses
- LCSH: Semiconductors -- Testing -- Optical methods -- Congresses
- LCSH: Integrated circuits -- Testing -- Optical methods -- Congresses
- LCSH: Optical pattern recognition -- Congresses
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- データソース種別
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- CiNii Books