Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California

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Bibliographic Information

Title
"Rapid thermal and related processing techniques : 2-3 October 1990, Santa Clara, California"
Statement of Responsibility
Rajendra Singh, Mehrdad M. Moslehi, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Publisher
  • SPIE
Publication Year
  • c1991
Book size
28 cm

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Notes

Papers presented at the SPIE Conference on Rapid Thermal and Related Processing Techniques

Includes bibliographical references and index

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