Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III

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Bibliographic Information

Title
"Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing III"
Statement of Responsibility
edited by D.N. Schmidt ; [sponsored by] the Electrochemical Society. Electronics Division
Publisher
  • The Electrochemical Society
Publication Year
  • c1994
Book size
24 cm

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Notes

Includes bibliographies and index

"held May 23-27, 1994 in San Francisco, CA"

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Details 詳細情報について

  • CRID
    1130000795014103936
  • NII Book ID
    BA23030773
  • ISBN
    1566770416
  • LCCN
    94070841
  • Web Site
    https://lccn.loc.gov/94070841
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
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