Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California

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Bibliographic Information

Title
"Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California"
Statement of Responsibility
Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering
Publisher
  • UMI
Publication Year
  • c1989
Book size
28 cm

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Notes

Facsimile reprint. originally published: Bellingham, Wash. : SPIE

Includes bibliographical references and index

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