Bibliographic Information
- Title
- "Silicon processing : a symposium"
- Statement of Responsibility
- sponsored by ASTM Committee F-1 on Electronics, National Bureau of Standards, and Stanford University, San Jose, Calif., 19-22 Jan. 1982 / D.C. Gupta, editor
- Publisher
-
- ASTM
- Publication Year
-
- c1983
- Book size
- 24 cm
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Notes
Papers presented at the Symposium on Silicon Processing, held in San Jose, Calif., Jan 19-22, 1982
"ASTM publication code number (PCN) 04-804000-46."
Includes bibliographical references and index
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Details 詳細情報について
-
- CRID
- 1130000795037748352
-
- NII Book ID
- BA04320787
-
- LCCN
- 82083529
-
- Web Site
- https://lccn.loc.gov/82083529
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- Text Lang
- en
-
- Country Code
- us
-
- Title Language Code
- en
-
- Place of Publication
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- Philadelphia, Pa. (1916 Race St., Philadelphia 19103)
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- Classification
-
- LCC: TK7871.15.S55
- DC19: 621.3815/2
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- Subject
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- LCSH: Silicon -- Congresses
- LCSH: Semiconductors -- Congresses
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- Data Source
-
- CiNii Books
