ULSI process integration : proceedings of the first international symposium
Bibliographic Information
- Title
- "ULSI process integration : proceedings of the first international symposium"
- Statement of Responsibility
- editors, C.L. Claeys ... [et al.]
- Publisher
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- Electrochemical Society
- Publication Year
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- 1999
- Book size
- 24 cm
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Notes
"Includes papers that were presented at the First Symposium on ULSI Process Integration held in Honolulu, Hawaii at the 196th Meeting of the Electrochemical Society, October 17-22, 1999"--Pref
Includes bibliographical references and indexes
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Details 詳細情報について
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- CRID
- 1130000795067150720
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- NII Book ID
- BA50226971
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- ISBN
- 1566772419
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- LCCN
- 99066095
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- Web Site
- https://lccn.loc.gov/99066095
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- Text Lang
- en
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- Country Code
- us
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- Title Language Code
- en
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- Place of Publication
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- Pennington, NJ
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- Data Source
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- CiNii Books