ULSI process integration : proceedings of the first international symposium

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Bibliographic Information

Title
"ULSI process integration : proceedings of the first international symposium"
Statement of Responsibility
editors, C.L. Claeys ... [et al.]
Publisher
  • Electrochemical Society
Publication Year
  • 1999
Book size
24 cm

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Notes

"Includes papers that were presented at the First Symposium on ULSI Process Integration held in Honolulu, Hawaii at the 196th Meeting of the Electrochemical Society, October 17-22, 1999"--Pref

Includes bibliographical references and indexes

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Details 詳細情報について

  • CRID
    1130000795067150720
  • NII Book ID
    BA50226971
  • ISBN
    1566772419
  • LCCN
    99066095
  • Web Site
    https://lccn.loc.gov/99066095
  • Text Lang
    en
  • Country Code
    us
  • Title Language Code
    en
  • Place of Publication
    • Pennington, NJ
  • Data Source
    • CiNii Books
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