Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes

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書誌事項

タイトル
"Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes"
責任表示
editors, G.S. Mathad, M. Meyyappan, M. Engelhardt ; Dielectric Science & Technology, Electronics, and Electrodeposition Divisions
出版者
  • Electrochemical Society
出版年月
  • c1998
書籍サイズ
23 cm
タイトル別名
  • Thin film materials, processes, reliability, and applications: thin film processes

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注記

"Held as a part of the Joint International Meeting of the Electrochemical Society, Inc. and the International Society for Electrochemistry in Paris, France, Aug. 31-Sept. 5, 1997"--P. iii

Includes bibliographical references and indexes

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