Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Fair, Richard B., Pearce, Charles W., Washburn, Jack, Symposium on Impurity Diffusion and Gettering in Semiconductors, Materials Research Society. Meeting, Materials Research Society

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

Web Site CiNii 所蔵館 13館

書誌事項

タイトル: "Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A."

責任表示: editors, Richard B. Fair, Charles W. Pearce, Jack Washburn

出版者

Materials Research Society

出版年月

c1985

書籍サイズ: 24 cm

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注記

"Proceedings of the Symposium on Impurity Diffusion and Gettering in Semiconductors ... held as Symposium C at the Material's Research Society Meeting, November 27-30, 1984 in Boston"--Acknowledgments

Includes bibliographies and indexes

Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

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Impurity diffusion and gettering in silicon : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A.

書誌事項

この図書・雑誌をさがす

注記

関連図書・雑誌

詳細情報 詳細情報について

書き出し

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