Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA
書誌事項
- タイトル
- "Design and process integration for microelectronic manufacturing II : 26-28 February 2003, Santa Clara, California, USA"
- 責任表示
- Alexander Starikov, chair/editor ; sponsored ... by SPIE--the International Society for Optical Engineering
- 出版者
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- SPIE
- 出版年月
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- c2003
- 書籍サイズ
- 28 cm
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注記
2002 conference proceedings titled: Design, process integration, and characterization for microelectronics
Includes bibliographical references and index
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詳細情報 詳細情報について
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- CRID
- 1130000795207037952
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- NII書誌ID
- BA86007812
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- ISBN
- 0819448478
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- LCCN
- 2004296398
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- Web Site
- https://lccn.loc.gov/2004296398
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- 本文言語コード
- en
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- 出版国コード
- us
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- タイトル言語コード
- en
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- 出版地
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- Bellingham, Wash.
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- 件名
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- LCSH: Integrated circuits -- Design and construction -- Congresses
- LCSH: Integrated circuits -- Defects -- Analysis -- Congresses
- LCSH: Semiconductors -- Design and construction -- Congresses
- LCSH: Semiconductor wafers -- Defects -- Analysis -- Congresses
- LCSH: Microelectronics industry -- Quality control -- Congresses
- LCSH: Quality control -- Congresses
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- データソース種別
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- CiNii Books