Emerging semiconductor technology : a symposium

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Bibliographic Information

Title
"Emerging semiconductor technology : a symposium"
Statement of Responsibility
sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors
Publisher
  • American Society for Testing and Materials
Publication Year
  • c1987
Book size
24 cm

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Notes

Papers presented at the Fourth International Symposium on Semiconductor Processing

"ASTM publication code number (PCN) 04-960000-46."

Includes bibliographies and indexes

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