ULSI Process Integration : proceedings of the International Symposium

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書誌事項

タイトル
"ULSI Process Integration : proceedings of the International Symposium"
責任表示
editors, C.L. Claeys ... [et al.]
出版者
  • Electrochemical Society
出版年月
  • c2001-2005
書籍サイズ
24 cm
シリーズ名/番号
  • II
  • III
  • IV

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注記

II: "... the second international symposium on ULSI Process Integration, held in Washington D.C. on March 24-31, 2001 as part of the 199th Meeting of the Electrochemical Society"--on pref

II: xiii, 614 p.

III: "... Third Symposium on ULSI Process Integration held in Paris, France at the 203rd Meeting of the Electrochemical Society, April 28-May 2, 2003" --on pref.

III: xvii, 598 p.

IV: xiii, 434 p.

"The ULSI Process Integration Symposium was sponsored by the Electronics Division of the Electrochemical Society and by the Electron Devices Society of the IEEE"--on pref

Includes bibliographical references and indexes

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